Development of measurement system for microstructures using an optical fiber probe: improvement of measurable region and depth
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
https://iopscience.iop.org/article/10.1088/1361-6501/ab7efc/pdf
Reference36 articles.
1. Twin-Probe Vibroscanning Method for Dimensional Measurement of Microholes
2. Development of a virtual probe tip with an application to high aspect ratio microscale features
3. Study of a micro-roughness probe with ultrasonic sensor
4. Development of a three-dimensional vibrating tactile probe for miniature CMMs
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