Twin-Probe Vibroscanning Method for Dimensional Measurement of Microholes-Reference-Cited by-同舟云学术

Twin-Probe Vibroscanning Method for Dimensional Measurement of Microholes

Published:1997 Issue:1 Volume:46 Page:437-440
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Masuzawa T.,Kim B.J.,Bergaud C.,Fujino M.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference7 articles.

1. Realisation of silicon-based twin microstylus for 3 dimensional characterisation of deep microholes;Bergaud;Proceedings of 3rd France-Japan Congress & 1st Europe-Asia Congress on Mechatronics,1996

2. Advanced vibroscanning method for microhole measurement;Kim;International Journal of Electrical Machining,1995

3. Vibroscanning method for nondestructive measurement of small holes;Masuzawa;Annals of the CIRP,1993

4. Fiberoptics for In-line Production Measurements;Pfeifer;Annals of the CIRP,1992

5. Measurement of Surface Shape by Scanning Electron Microscope Using Detection of Normal;Sato;Annals of the CIRP,1986

Cited by 30 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Three-dimensional information measurement and reconstruction for micro-hole array based on the modified shape from focus;Optics and Lasers in Engineering;2024-07

2. Measurement Techniques for Three-Dimensional Metrology of High Aspect Ratio Internal Features—A Review;Metrology;2023-04-17

3. Multi-axis modulated compact fiber-based Fabry–Perot interferometric probe;Applied Optics;2022-03-28

4. Development of measurement system for microstructures using an optical fiber probe: improvement of measurable region and depth;Measurement Science and Technology;2020-05-05

5. Integration of a piezoresistive microprobe into a commercial gear measuring instrument;Precision Engineering;2019-01