Characterization of the measurement uncertainty of a laboratory EUV reflectometer for large optics-Reference-Cited by-同舟云学术

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Characterization of the measurement uncertainty of a laboratory EUV reflectometer for large optics

Published:2006-11-30 Issue:1 Volume:18 Page:126-130
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Scholze Frank,Böttger Thomas,Enkisch Hartmut,Laubis Christian,Loyen Ludwig van,Macco Fritz,Schädlich Stefan

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Reference14 articles.

1. Worldwide technologies and the ITRS in the current economic climate

2. Recent developments in EUV reflectometry at the Advanced Light Source

3. High-accuracy radiometry in the EUV range at the PTB soft x-ray beamline

4. New PTB reflectometer for the characterization of large optics for the extreme-ultraviolet spectral region

5. The EUV metrology program of PTB

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