Author:
Scholze F,T mmler J,Ulm G
Cited by
120 articles.
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1. Soft X-ray performance of an optimised charge-coupled device for astronomy;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2024-09
2. Interface sharpness in stacked thin film structures: a comparison of soft X-ray reflectometry and transmission electron microscopy;Journal of Micro/Nanopatterning, Materials, and Metrology;2024-08-23
3. Soft x-ray reflectometry for the inspection of interlayer roughness in stacked thin film structures;Metrology, Inspection, and Process Control XXXVIII;2024-04-10
4. A versatile beamline for soft x-ray reflectivity, absorption, and fluorescence measurements at Indus-2 synchrotron source;Review of Scientific Instruments;2024-02-01
5. Tabletop extreme ultraviolet reflectometer for quantitative nanoscale reflectometry, scatterometry, and imaging;Review of Scientific Instruments;2023-12-01