A sub-50 nm three-step height sample for AFM calibration
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/25/i=12/a=125004/pdf
Reference15 articles.
1. AFM data analysis: separating surface microtopography from instrumental artifacts
2. AFM image artifacts
3. New method to estimate step heights in scanning-probe microscope images
4. Influence of data analysis and other factors on the short-term stability of vertical scanning-probe microscope calibration measurements
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3. A Cluster-Based Method for Quantitative Characterization and Uncertainty Evaluation of Areal Step Height in Structured Surface Metrology;IEEE Transactions on Instrumentation and Measurement;2022
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