Effects of mathematical models and algorithms on quantitative characterization of areal step height with optical and stylus profilometers-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Effects of mathematical models and algorithms on quantitative characterization of areal step height with optical and stylus profilometers

Published:2021-11 Issue: Volume:72 Page:777-788
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Wang Chen^ORCID,Yu Yingjie,Zhang Xiangchao,D'Amato Roberto,Gomez Emilio^ORCID

Publisher

Elsevier BV

Subject

General Engineering

Reference28 articles.

1. Calibration method of curvature distortion in step height measurement by atomic force microscopy;Li;IOP Conf Ser Mater Sci Eng,2020

2. Time-of-flight detection of femtosecond laser pulses for precise measurement of large microelectronic step height;Lu;Opt Lett,2018

3. High-accuracy simultaneous measurement of surface profile and film thickness using line-field white-light dispersive interferometer;Guo;Opt Laser Eng,2021

4. Microstructure, post thermal treatment response, and tribological properties of 3D printed 17-4 PH stainless steel;Lashgari;Wear,2020

5. A sub-50 nm three-step height sample for AFM calibration;Yang;Meas Sci Technol,2014

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Standard-Deviation-Based Adaptive Median Filter for Elimination of Batwing Effects in Step Microstructure Measurement Using Digital Holography;Sensors;2024-09-12

2. Phase-based reconstruction optimization method for digital holographic measurement of microstructures;Applied Optics;2023-06-01

3. A Cluster-Based Method for Quantitative Characterization and Uncertainty Evaluation of Areal Step Height in Structured Surface Metrology;IEEE Transactions on Instrumentation and Measurement;2022

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3