Calibration of the straightness and orthogonality error of a laser feedback high-precision stage using self-calibration methods
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/25/i=12/a=125007/pdf
Reference12 articles.
1. Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute Testing’
2. Quality assurance procedures for MEBES
3. Absolute 2-D Sub-Micron Metrology For Electron Beam Lithography
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