Real-time displacement calculation and offline geometric calibration of the grating interferometer system for ultra-precision wafer stage measurement
Author:
Funder
National Natural Science Foundation of China
Publisher
Elsevier BV
Subject
General Engineering
Reference19 articles.
1. Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness;Kimura;Precis Eng,2010
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