Simultaneous multiple degrees of freedom (DoF) measurement system
Author:
Funder
EMRP EURAMET
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/27/i=8/a=084011/pdf
Reference11 articles.
1. Compact field programmable gate array (FPGA)-based multi-axial interferometer for simultaneous tilt and distance measurement in the sub-nanometre range
2. Six Degree of Freedom Sensing For Docking Using IR LED Emitters and Receivers
3. Metrological large range scanning probe microscope
4. Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy
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