Compact field programmable gate array (FPGA)-based multi-axial interferometer for simultaneous tilt and distance measurement in the sub-nanometre range-Reference-Cited by-同舟云学术

Compact field programmable gate array (FPGA)-based multi-axial interferometer for simultaneous tilt and distance measurement in the sub-nanometre range

Published:2011-08-08 Issue:9 Volume:22 Page:094026
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Strube Sebastian,Molnar Gabor,Danzebrink Hans-Ulrich

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Link

http://stacks.iop.org/0957-0233/22/i=9/a=094026/pdf

Reference16 articles.

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