Novel control scheme for a high-speed metrological scanning probe microscope
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/22/i=9/a=094012/pdf
Reference18 articles.
1. Application of the metrological scanning probe microscope for high-precision, long-range, traceable measurements
2. Advances in Scanning Force Microscopy for Dimensional Metrology
3. Dimensionelle Nanometrologie in der PTB – eine Übersicht (Dimensional Nanometrology at PTB – a Survey)
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