Optical heterodyne laser encoder with sub-nanometer resolution
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference12 articles.
1. High-resolution laser linear encoder with numerical error compensation
2. Development of a small ultraprecision positioning device with 5 nm resolution
3. Signal Processing Algorithms for Doppler Effect Based Nanometer Positioning Systems
4. Two-color heterodyne optical zooming method for nanometer measurement
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