面向光刻机晶圆台的超精密光栅定位技术
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Published:2022
Issue:9
Volume:59
Page:0922019
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Zhu Junhao 朱俊豪,Wang Shengtong 汪盛通,Li Xinghui 李星辉
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics