Large-diameter plasma profile monitoring system using Faraday cup and Langmuir probe arrays-Reference-Cited by-同舟云学术

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Large-diameter plasma profile monitoring system using Faraday cup and Langmuir probe arrays

Published:1993-12-01 Issue:12 Volume:4 Page:1484-1488
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

O'Morain C,O'Keeffe P,Den S,Hayashi Y

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Link

http://stacks.iop.org/0957-0233/4/i=12/a=027/pdf

Reference15 articles.

1. Langmuir probe measurements of the electron energy distribution function in radio‐frequency plasmas

2. Plasma parameter and etch measurements in a multipolar confined electron cyclotron resonance discharge

3. 8” Uniform Electron Cyclotron Resonance Plasma Source Using a Circular TE01Mode Microwave

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1. Beam characterization at the KAERI UED beamline;Journal of the Korean Physical Society;2016-09

2. Design and study of an enhanced Faraday cup detector;Vacuum;2009-05

3. Faraday cup detector array with electronic multiplexing for multichannel mass spectrometry;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2002-05

4. Micromachined Faraday cup array using deep reactive ion etching;Sensors and Actuators A: Physical;2002-01

5. Heat transfer—a review of 1993 literature;International Journal of Heat and Mass Transfer;1996-03

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