8” Uniform Electron Cyclotron Resonance Plasma Source Using a Circular TE01Mode Microwave-Reference-Cited by-同舟云学术

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8” Uniform Electron Cyclotron Resonance Plasma Source Using a Circular TE01Mode Microwave

Published:1993-01-15 Issue:Part 1, No. 1A Volume:32 Page:174-178
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Hidaka Ryota,Yamaguchi Toru,Hirotsu Nobuyoshi,Ohshima Takaharu,Koga Ryuji,Tanaka Masayoshi,Kawai Yoshinobu

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Introduction;Compact Plasma and Focused Ion Beams;2013-11-20

2. 11–13GHz electron cyclotron resonance plasma source using cylindrically comb-shaped magnetic-field configuration for broad ion-beam processing;Review of Scientific Instruments;2006-11

3. Utilization of ECR mechanism of electrons heating in multipolar magnetic systems of low-pressure plasma Reactors;IEEE Transactions on Plasma Science;2006-02

4. An investigation of the heating of electrons in multipolar magnet systems and design of low-pressure electron-cyclotron-resonance microwave-frequency reactors;High Temperature;2006-01

5. The Heating of Electrons in Magnetic Traps of Low-Pressure Electron-Cyclotron-Resonance Microwave-Frequency Reactors;High Temperature;2005-09

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