Integration of a silicon-based microprobe into a gear measuring instrument for accurate measurement of micro gears
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/25/i=6/a=064016/pdf
Reference10 articles.
1. Universal characterization method for 3D tactile probing systems
2. Micro sensors with polymer membrane for accurate 3D force and displacement measurements
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