Experimental uncertainty evaluation by measuring a micro gear standard using focus variation

Abstract

Abstract Micro gears play an increasingly important role in various industrial applications, and the minimization of their deviations is challenging for metrology and manufacturing. A promising method is the focus variation technology, which enables areal measurements of micro gears. Practice-related standards are used to determine measurement uncertainties by comparison with calibration values. In this work, the external micro gear standard of the Physikalisch–Technische Bundesanstalt is used to evaluate experimental measurement uncertainties of a focus variation coordinate measurement system for the first time. The traceable standard with modules between 0.1 and 1 mm is calibrated using micro tactile coordinate measurements. Optical and tactile measurements are then compared. As a result, small expanded measurement uncertainties of less than 4 μm are achieved.