Noise robustness of interferometric surface topography evaluation methods. Correlogram correlation
Author:
Funder
Bundesministerium für Wirtschaft und Energie
Publisher
IOP Publishing
Subject
Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation
Link
http://iopscience.iop.org/article/10.1088/2051-672X/aa9459/pdf
Reference30 articles.
1. Principles of interference microscopy for the measurement of surface topography
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5. Interferometric profiler for rough surfaces
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