Scatterometry—fast and robust measurements of nano-textured surfaces-Reference-Cited by-同舟云学术

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Scatterometry—fast and robust measurements of nano-textured surfaces

Published:2016-04-05 Issue:2 Volume:4 Page:023003
ISSN:2051-672X
Container-title:Surface Topography: Metrology and Properties
language:
Short-container-title:Surf. Topogr.: Metrol. Prop.

Author:

Madsen Morten Hannibal^ORCID,Hansen Poul-Erik

Funder

Eurostars

European Metrology Programme for Innovation and Research

The Danish Agency for Science, Technology and Innovation

Publisher

IOP Publishing

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation

Link

http://stacks.iop.org/2051-672X/4/i=2/a=023003/pdf

Reference139 articles.

1. II. The Bakerian Lecture. On the theory of light and colours

2. A compact grating-stabilized diode laser system for atomic physics

3. Review and status of wavelength-division-multiplexing technology and its application

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