Comparison of material measures for the determination of transfer characteristics of surface topography measuring instruments
Author:
Funder
Deutsche Forschungsgemeinschaft
Publisher
IOP Publishing
Subject
Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation
Link
http://iopscience.iop.org/article/10.1088/2051-672X/ab0dc6/pdf
Reference33 articles.
1. Determination of the transfer function for optical surface topography measuring instruments—a review
2. Determination of the short wavelength cutoff of interferential and confocal microscopes
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