Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1674-1056/24/11/115201/pdf
Reference30 articles.
1. Principles of Plasma Discharges and Materials Processing
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4. Ion energy distribution change at the transition of power-coupling modes in an immersed-coil-type inductively coupled Ar discharge
5. On the E - H mode transition in RF inductive discharges
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1. Numerical simulation of the hysteresis of the transition from the stationary to oscillatory regime in the low-pressure DC glow discharge;Physics of Plasmas;2023-04-01
2. Measurement of electronegativity during the E to H mode transition in a radio frequency inductively coupled Ar/O2 plasma*;Chinese Physics B;2021-03-01
3. Numerical investigation of low pressure inductively coupled plasma sources: A review;Acta Physica Sinica;2021
4. Investigation of E–H mode transition in magnetic-pole-enhanced inductively coupled neon–argon mixture plasma;Plasma Science and Technology;2020-05-05
5. Mode Transition and Hysteresis in Inductively Coupled Plasma Sources;Plasma Science and Technology - Basic Fundamentals and Modern Applications;2019-02-27
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