Two‐dimensional self‐consistent fluid simulation of radio frequency inductive sources-Reference-Cited by-同舟云学术

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Two‐dimensional self‐consistent fluid simulation of radio frequency inductive sources

Published:1994-07 Issue:4 Volume:12 Page:1387-1396
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

DiPeso G.,Vahedi V.,Hewett D. W.,Rognlien T. D.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.579326

Cited by 46 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Simulation of hollow-cathode-nitriding plasma and design of diffusion equipment with DC and RF dual discharge;Physica Scripta;2023-01-24

2. Effects of chamber size on electron bounce-resonance heating and power deposition profile in a finite inductive discharge;Physics of Plasmas;2022-06

3. Conductivity effects during the transition from collisionless to collisional regimes in cylindrical inductively coupled plasmas;Plasma Science and Technology;2022-04-13

4. Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model;Chinese Physics B;2015-11

5. Modelling of fluorine based high density plasma for the etching of silica glasses;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2011-09

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