Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1674-1056/26/11/115201/pdf
Reference35 articles.
1. Modeling and diagnostics of the structure of rf glow discharges in Ar at 13.56 MHz
2. Continuum modeling of argon radio frequency glow discharges
3. Experimental and numerical investigation of a capacitively coupled low-radio frequency nitrogen plasma
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. The Discharge Characteristics of Capacitively Coupled Ar Plasma as the Change of Pressure;Plasma Physics Reports;2023-06
2. Parametric Studies of CCRF in Ar on 1D Model: Effect of Pressure and Dielectric Layers;Fusion Science and Technology;2023-01-17
3. Analysis of 2D Simulation of Hydrogenated Silicon Nitride Plasma Discharge in CCP Reactor for Thin Film Solar Cell Deposition;Lecture Notes in Electrical Engineering;2023
4. Influence of an Alternating Phase on the Electron Heating in Capacitively Coupled Radio-Frequency Discharges;Lecture Notes in Electrical Engineering;2023
5. Study of the Neon Dielectric Barrier Discharge on a Capacitively Coupled Radio Frequency at a Low Pressure with Metastable Atom Density: Effect of the Pressure;Ukrainian Journal of Physics;2022-11-26
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3