Collisionless magnetized sheath resonance heating induced by a transverse magnetic field in low-pressure capacitive rf discharges

Abstract

Abstract The mechanism of resonance heating between the gyrating electrons and the oscillating sheath induced by a small transverse magnetic field in low-pressure capacitively coupled plasmas is investigated. The gyrating electrons will coherently collide with the expanding sheath if the electron gyro-frequency coincides with half the driving frequency. These electrons will gain substantial energy from collision-less heating, which strongly enhances the electron power absorption and the plasma density at a constant driving voltage. The electron kinetics is revealed at resonant conditions by particle simulations. Our numerical results demonstrate that the relation between the magnetic field and the driving frequency determines this resonance effect. Besides, it is found that the operating pressure, electrode gap, and driving voltage all strongly affect this electron resonance mechanism. The resonance effect is more pronounced at the conditions of low pressure, large gap, and high voltage.