Electrical breakdown in dual-frequency capacitively coupled plasma: a collective simulation
Author:
Funder
National Natural Science Foundation of China
National Magnetic Confinement Fusion Energy Research Project
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
https://iopscience.iop.org/article/10.1088/1361-6595/abff74/pdf
Reference49 articles.
1. Low-pressure gas breakdown in combined fields
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