Second-harmonic currents in rf-biased, inductively coupled discharges

Abstract

Abstract Capacitively-coupled plasmas generate strong current or voltage signals at harmonics of their driving frequencies. Inductively coupled plasma (icp) systems generally do not, unless they are equipped with capacitively-coupled rf bias, which generates strong signals at harmonics of its driving frequency. Recently, however, at an asymmetric, rf-biased electrode, a current component was detected at the second harmonic of the inductive source frequency, not the rf-bias frequency. The origin of this current is here investigated (in argon discharges at 1.3 Pa) by comparison with measurements made at a symmetric electrode and predictions made by two numerical models. The first simulates the sheath at the rf-biased electrode; the second models the plasma. Because capacitive coupling from the inductive source was minimized by a Faraday shield, the nonlinearity of the sheath contributes negligible second-harmonic current. Modulation of the photon flux in the plasma, however, produces a second-harmonic current photoemitted from the rf-biased electrode. The external circuitry and nonlinear inductive coupling produce a second-harmonic sheath voltage, which in turn generates second-harmonic current both directly and through a transit-time effect. The second model simulates how electrons emitted from the electrode—and then reflected at the quartz dielectric window of the inductive source—are deflected by the electric and magnetic fields in the plasma. It also gives predictions for the transit-time effect. Magnetic deflections and the transit-time effect usually dominate the electric deflection. Together these three mechanisms produce a second-harmonic current that has a Fourier amplitude approximately half the current that is elastically reflected at the icp window. These results suggest it may be possible to use the second-harmonic current to determine the elastic reflection coefficient at the window.