The role of the metastable O2(b${{}^{1}}{\Sigma}_{\text {g}}^{+}$ ) and energy-dependent secondary electron emission yields in capacitively coupled oxygen discharges
Author:
Funder
Icelandic Research Fund
Swedish Government Agency for Innovation Systems (VINNOVA)
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/25/i=5/a=055002/pdf
Reference100 articles.
1. Electron heating of voltage-driven and matched dual frequency discharges
2. Electron heating in low pressure capacitive discharges revisited
3. Simulation study of stochastic heating in single-frequency capacitively coupled discharges with critical evaluation of analytical models
4. On the role of metastables in capacitively coupled oxygen discharges
5. The pressure dependence of the discharge properties in a capacitively coupled oxygen discharge
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