The role of the metastable O2(b${{}^{1}}{\Sigma}_{\text {g}}^{+}$ ) and energy-dependent secondary electron emission yields in capacitively coupled oxygen discharges
Author:
Funder
Icelandic Research Fund
Swedish Government Agency for Innovation Systems (VINNOVA)
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/25/i=5/a=055002/pdf
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5. The pressure dependence of the discharge properties in a capacitively coupled oxygen discharge
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