Foundations of low-temperature plasma enhanced materials synthesis and etching
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Published:2018-02-12
Issue:2
Volume:27
Page:023001
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ISSN:1361-6595
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Oehrlein Gottlieb SORCID,
Hamaguchi SatoshiORCID
Subject
Condensed Matter Physics
Cited by
116 articles.
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