Chemical vapour deposition promoted by r.f. discharge
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. Silicon nitrides: Some physico-chemical properties
2. Electrical Properties of Thin Organic Films
3. Dielectric Properties of Cross-linked Polystyrene Film formed in the Glow Discharge
4. Glow Discharge Formation of Silicon Oxide and The Deposition of Silicon Oxide Thin Film Capacitors by Glow Discharge Techniques
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