A transmission line model of the cutoff probe-Reference-Cited by-同舟云学术

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A transmission line model of the cutoff probe

Published:2019-05-23 Issue:5 Volume:28 Page:055014
ISSN:1361-6595
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Kim S J^ORCID,Lee J J^ORCID,Kim D W^ORCID,Kim J H,You S J^ORCID

Funder

Ministry of Science, ICT and Future Planning

National Research Council of Science and Technology

Korea Research Institute of Standards and Science

Ministry of Trade, Industry and Energy

Korea Institute of Energy Technology Evaluation and Planning and the Ministry of Trade, Industry & Energy (MOTIE) of the Republic of Korea

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Link

http://iopscience.iop.org/article/10.1088/1361-6595/ab1dc8/pdf

Reference21 articles.

1. Principles of Plasma Discharges and Materials Processing

2. Plasma frequency measurements for absolute plasma density by means of wave cutoff method

3. MEASUREMENT OF PLASMA DENSITY USING A GAS LASER AS AN INFRARED INTERFEROMETER

4. Optical emission spectroscopy of electrical discharge machining plasma

5. Measurement of electron temperature and density in an argon microdischarge by laser Thomson scattering

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1. Initiation mechanism of arcing generated in RF capacitively coupled plasma;Physica Scripta;2024-04-02

2. Computational Study on the Parallel Double-Curling Probe for Multi-Site Electron Density Measurement in Low-Temperature Plasma;Applied Science and Convergence Technology;2023-09-12

3. Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma;Materials;2023-08-22

4. Development of High Accuracy VI Sensor;2023 IEEE International Conference on Plasma Science (ICOPS);2023-05-21

5. Contribution of Ion Energy and Flux on High-Aspect Ratio SiO2 Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/C4F8 Plasma: Individual Ion Energy and Flux Controlled;Materials;2023-05-18

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