Plasma non-uniformity in a symmetric radiofrequency capacitively-coupled reactor with dielectric side-wall: a two dimensional particle-in-cell/Monte Carlo collision simulation-Reference-Cited by-同舟云学术

Plasma non-uniformity in a symmetric radiofrequency capacitively-coupled reactor with dielectric side-wall: a two dimensional particle-in-cell/Monte Carlo collision simulation

Published:2018-02-06 Issue:2 Volume:27 Page:025006
ISSN:1361-6595
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Liu Yue^ORCID,Booth Jean-Paul^ORCID,Chabert Pascal

Funder

China Scholarship Council

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Link

http://iopscience.iop.org/article/10.1088/1361-6595/aaa86e/pdf

Reference55 articles.

1. Self‐consistent fluid modeling of radio frequency discharges in two dimensions

2. Spatial variations in the charge density of argon discharges in the Gaseous Electronics Conference reference reactor

3. Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor

4. The influence of antenna configuration and standing wave effects on density profile in a large-area inductive plasma source

5. Microwave discharges at low pressures and peculiarities of the processes in strongly non-uniform plasma

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