Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevE.51.1376/fulltext
Reference67 articles.
1. Comparison of electron‐density measurements made using a Langmuir probe and microwave interferometer in the Gaseous Electronics Conference reference reactor
2. Spatial variations in the charge density of argon discharges in the Gaseous Electronics Conference reference reactor
3. Effect of Space Charge in Cold-Cathode Gas Discharges
4. Calculations of Cathode‐Fall Characteristics
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