Ion energies delivered by negative and positive ionization waves to flat dielectric surfaces

Abstract

Abstract The information on typical values of ion energy and angular distributions (IEADs) on surfaces delivered by plasma jets is equally important for the plasma processing and plasma medicine. In this paper, we report on results from a 2D computational investigation of the IEADs when plasma jet interacts with a weakly conductive dielectric surface. The IEADs are computed using Monte Carlo techniques. The ion fluxes to surfaces are recorded simultaneously with IEADs. The results of this investigation suggest that ion energies on surfaces delivered by plasma jets can be rather high. In particular, we demonstrate that an ionization wave (IW) in plasma jets of positive cycle or pulse can produce ions with energies of a few eV. In case of negative IW the ions are almost thermalized.