The influence of the Ar/O2ratio on the electron density and electron temperature in microwave discharges
Author:
Funder
Fundação para a Ciência e a Tecnologia
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://iopscience.iop.org/article/10.1088/1361-6595/aa8d04/pdf
Reference50 articles.
1. Plasma and surface diagnostics during plasma-enhanced chemical vapor deposition of SiO2 from SiH4/O2/Ar discharges
2. A soft Plasma Enhanced-Chemical Vapor Deposition process for the tailored synthesis of SiO2 films
3. Deposition of Thin Films of SiOxCyH in a Surfatron Microwave Plasma Reactor with Hexamethyldisiloxane as Precursor
4. Type of precursor and synthesis of silicon oxycarbide (SiOxCyH) thin films with a surfatron microwave oxygen/argon plasma
5. Low‐loss optical fibers prepared by plasma‐activated chemical vapor deposition (CVD)
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Electron density measurement of Ar, N2, O2, and Ar mixtures (with N2 and O2) gas in inductively coupled plasma (ICP) using terahertz time domain spectroscopy;Optics & Laser Technology;2025-01
2. Measurement of laser induced fluorescence for argon plasma flow with oxygen injection;AIP Advances;2023-07-01
3. Power concentration determined by thermodynamic properties in complex gas mixtures: the case of plasma-based dry reforming of methane;Plasma Sources Science and Technology;2023-04-01
4. Effect of O2/N2 glow discharge plasma on zeolite extrudates as water adsorbent;Chemical Engineering and Processing - Process Intensification;2022-11
5. Diagnostic study of capacitively coupled neon rf plasma with traces of O2/H2 at intermediate pressure;Journal of Physics D: Applied Physics;2022-05-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3