EUV emission spectra in collisions of multiply charged Sn ions with He and Xe
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,Atomic and Molecular Physics, and Optics
Reference26 articles.
1. EUV Sources for Lithography
2. Plasma physics and radiation hydrodynamics in developing an extreme ultraviolet light source for lithography
3. Statistics and characteristics of xuv transition arrays from laser-produced plasmas of the elements tin through iodine
4. Characterization of a vacuum-arc discharge in tin vapor using time-resolved plasma imaging and extreme ultraviolet spectrometry
5. Comparison of experimental and simulated extreme ultraviolet spectra of xenon and tin discharges
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