Elastic scattering of low-energy electrons by NF3
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,Atomic and Molecular Physics, and Optics
Reference27 articles.
1. High density plasma oxide etching using nitrogen trifluoride and acetylene
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2. Plasma-relevant fast electron impact study of nitrogen trifluoride;Plasma Sources Science and Technology;2020-08-12
3. Computation of electron impact scattering studies on benzene;The European Physical Journal D;2018-12
4. Cross Sections for Electron Collisions with NF3;Journal of Physical and Chemical Reference Data;2017-12
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