Cross Sections for Electron Collisions with NF3-Reference-Cited by-同舟云学术

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Cross Sections for Electron Collisions with NF3

Published:2017-12 Issue:4 Volume:46 Page:043104
ISSN:0047-2689
Container-title:Journal of Physical and Chemical Reference Data
language:en
Short-container-title:Journal of Physical and Chemical Reference Data

Author:

Song Mi-Young,Yoon Jung-Sik,Cho Hyuck¹,Karwasz Grzegorz P.²,Kokoouline Viatcheslav³,Nakamura Yoshiharu⁴,Hamilton James R.,Tennyson Jonathan

Affiliation:

1. Department of Physics, Chungnam National University, Daejeon 305-764, South Korea

2. Faculty of Physics, Astronomy and Applied Informatics, University Nicolaus Copernicus, Grudziadzka 5, Toruń 87-100, Poland

3. Department of Physics, University of Central Florida, Orlando, Florida 32816, USA

4. 6-1-5-201 Miyazaki, Miyamae, Kawasaki 216-0033, Japan

Publisher

AIP Publishing

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy,General Chemistry

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5000687

Reference56 articles.

1. Insights to scaling remote plasma sources sustained in NF3mixtures

2. High density plasma oxide etching using nitrogen trifluoride and acetylene

3. Etching of UO2 in NF3 RF plasma glow discharge

4. Study of the NF3 plasma cleaning of reactors for amorphous silicon deposition

5. Remote plasma etching of silicon nitride and silicon dioxide using NF3/O2 gas mixtures

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3. Total Cross Sections for Electron and Positron Scattering on Molecules: In Search of the Dispersion Relation;Atoms;2021-11-22

4. Ionisation of PF3: absolute partial electron ionisation cross sections and the formation and reactivity of dication states;Physical Chemistry Chemical Physics;2021

5. Plasma induced vibrational excitation of CH4—a window to its mode selective processing;Plasma Sources Science and Technology;2020-09-01

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