Effects of oxygen flow ratio and thermal annealing on defect evolution of aluminum doped zinc oxide thin films by reactive DC magnetron sputtering-Reference-Cited by-同舟云学术

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Effects of oxygen flow ratio and thermal annealing on defect evolution of aluminum doped zinc oxide thin films by reactive DC magnetron sputtering

Published:2021-09-03 Issue:46 Volume:33 Page:465703
ISSN:0953-8984
Container-title:Journal of Physics: Condensed Matter
language:
Short-container-title:J. Phys.: Condens. Matter

Author:

Liu Chao Ping^ORCID,Li Zhan Hua,Egbo Kingsley O^ORCID,Kwok Cheuk Kai,Lv Xiao Hu,Ho Chun Yuen^ORCID,Wang Ying^ORCID,Yu Kin Man

Funder

Shantou University

General Research Fund of the Research Grants Council of Hong Kong SAR

Department of Science and Technology of Guangdong Province under Project

Guangdong Basic and Applied Basic Research Foundation

Optics and Photoelectronics Project

National Natural Science Foundation of China

Publisher

IOP Publishing

Subject

Condensed Matter Physics,General Materials Science

Link

https://iopscience.iop.org/article/10.1088/1361-648X/ac1f50/pdf

Reference52 articles.

1. Past achievements and future challenges in the development of optically transparent electrodes;Ellmer;Nat. Photonics,2012

2. Design strategy for p-type transparent conducting oxides;Hu;J. Appl. Phys.,2020

3. Resonant doping for high mobility transparent conductors: the case of Mo-doped In2O3;Swallow;Mater. Horiz.,2020

4. N-type doped transparent conducting binary oxides: an overview;Dixon;J. Mater. Chem. C,2016

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1. Defect-dependent environmental stability of high mobility transparent conducting In-doped CdO;Journal of Applied Physics;2024-01-23

2. Selective Surface Treatment Using Atmospheric Ar Plasma Jet for Aluminum‐doped Zinc Oxide Based Transparent and Flexible Electronics;Advanced Materials Interfaces;2023-09-14

3. Reducing Indium Consumption in Silicon Hetero Junction Solar Cells With TCO Stack Systems of ITO and AZO;IEEE Journal of Photovoltaics;2023-09

4. Room-temperature synthesized amorphous P-type transparent Ga2O3-Cu2S alloy thin films with tunable optoelectronic properties;Applied Surface Science;2023-04

5. Influence of rapid thermal annealing time on physical properties of Mg and F co-doped ZnO thin films deposited by radio frequency magnetron sputtering;Thin Solid Films;2022-09

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