Surface morphology of molybdenum silicide films upon low-energy ion beam sputtering
Author:
Funder
Comunidad Autónoma de Madrid (Spain)
Secretaría de Estado de Investigación, Desarrollo e Innovación
Publisher
IOP Publishing
Subject
Condensed Matter Physics,General Materials Science
Link
http://iopscience.iop.org/article/10.1088/1361-648X/aac4f6/pdf
Reference41 articles.
1. Self-organized nanopatterning of silicon surfaces by ion beam sputtering
2. Theory of ripple topography induced by ion bombardment
3. Real-time x-ray studies of Mo-seeded Si nanodot formation during ion bombardment
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