Effects of direct current discharge on the spatial distribution of cylindrical inductively-coupled plasma at different gas pressures
Author:
Funder
National Natural Science Foundation of China
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/1009-0630/20/i=1/a=014005/pdf
Reference37 articles.
1. Ion bombardment energy distributions in a radio frequency induction plasma
2. Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow discharge
3. Rf ion sources for fusion applications: design, development and performance
4. Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Mutual influence of the channels in a combined discharge based on the RF inductive and DC discharges;Vacuum;2022-04
2. Optimization of discharge antenna turn and modulation of EEPFs and plasma parameters in dual-frequency cylindrical ICP source at different gas pressures;Journal of Applied Physics;2020-07-07
3. Effects of aspect ratio on electron loss mechanisms and plasma uniformity in cylindrical inductively coupled plasma;Physics of Plasmas;2020-04
4. Characteristics of a dual-radio-frequency cylindrical inductively coupled plasma;Contributions to Plasma Physics;2019-02-04
5. Experimental investigation of plasma parameters in 13.56 MHz/2 MHz cylindrical inductively coupled plasma;Acta Physica Sinica;2019
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3