Investigation and optimization of a novel precision measurement method based on template matching

Abstract

Abstract The polar microstructure is a 10 μm aperiodic surface pattern, which is designed to achieve nanoscale resolution and applied in the precision measurement area. In this paper, an investigation of the major factors of a novel template-matching-based precision measurement method that integrates with the polar microstructure and computer vision (IPMCV) is proposed. In order to optimize the measurement performance of the IPMCV method, three crucial factors are determined according to the template-matching method: the size of the global image, the size of the template image and the number of interpolated sub-pixels. According to the measurement accuracy, the size of the global image has little influence on the position error, but significantly influences the standard deviation value of the error gradually. In addition, the size of the template image helps to significantly improve the measurement accuracy, and the increase in the number of interpolated sub-pixels increases the measurement accuracy within a certain range but has no effect afterward. The experimental results have great significance on the determination and optimization of parameters for the IPMCV method to achieve a better measurement performance.