Displacement measuring grating interferometer: a review
Author:
Publisher
Zhejiang University Press
Subject
Electrical and Electronic Engineering,Computer Networks and Communications,Hardware and Architecture,Signal Processing
Link
http://link.springer.com/content/pdf/10.1631/FITEE.1800708.pdf
Reference184 articles.
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2. Asano S, Goto T, Tanimura H, et al., 2001. Development of a new measurement system for straightness error by a heterodyne interferometer with a grating. Proc 10th Initiatives of Precision Engineering at the Beginning of a Millennium, p. 799–803. https://doi.org/10.1007/0-306-47000-4_157
3. Badami VG, de Groot PJ, 2013. Displacement measuring interferometry. In: Harding K (Ed.), Handbook of Optical Dimensional Metrology. CRC Press, Boca Raton, USA, p. 157–238.
4. Badaroglu M, Ng K, Salmani M, et al., 2014. More Moore landscape for system readiness—ITRS2.0 requirements. IEEE 32nd Int Conf on Computer Design, p. 147–152. https://doi.org/10.1109/ICCD.2014.6974674
5. Bae EW, Kim JA, Kim SH, 2011. Multi-degree-of-freedom displacement measurement system for milli-structures. Meas Sci Technol, 12:1495–1502. https://doi.org/10.1088/0957-0233/12/9/316
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