Author:
Han Zhongmei,Vehkamäki Marko,Mattinen Miika,Salmi Emma,Mizohata Kenichiro,Leskelä Markku,Ritala Mikko
Funder
Finnish Center of Excellence in Atomic Layer Deposition
China Scholarship Council
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering
Cited by
4 articles.
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