Electron Temperature Control in Inductively Coupled Nitrogen Plasmas by Adding Argon/Helium
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference10 articles.
1. Electron temperature control with grid bias in inductively coupled argon plasma
2. Tailoring of electron energy distributions in low-pressure inductive discharges
3. The finite size effect in a planar inductively coupled plasma
4. Electron energy distribution functions in He/N2 mixtures in the presence of metastable states
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1. The influence of the gas mixing ratio on some characteristics and reaction rate coefficients of Ar/N2 and He/N2 DC plasma;Arab Journal of Nuclear Sciences and Applications;2019-04-01
2. Evolution of plasma parameters in an Ar–N2/He inductive plasma source with magnetic pole enhancement;Plasma Science and Technology;2017-01-19
3. Characterization of RF He-N2/Ar mixture plasma via Langmuir probe and optical emission spectroscopy techniques;Physics of Plasmas;2016-08
4. Evolution of plasma parameters in a He- N2/Ar magnetic pole enhanced inductive plasma source;Physics of Plasmas;2016-02
5. Effect of helium mixing on excitation temperature and nitrogen dissociation in inductively coupled plasma;Current Applied Physics;2013-08
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