Evolution of plasma parameters in an Ar–N2/He inductive plasma source with magnetic pole enhancement
Author:
Funder
Higher Education Commission, Pakistan
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/1009-0630/19/i=2/a=025402/pdf
Reference28 articles.
1. Design of a magnetic-pole enhanced inductively coupled plasma source
2. On the E - H mode transition in RF inductive discharges
3. Hysteresis and the E-to-H transition in radiofrequency inductive discharges
4. Experiments and global model of inductively coupled rf Ar/N2 discharges
5. Nitrogen dissociation in a low pressure cylindrical ICP discharge studied by actinometry and mass spectrometry
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