Evolution of plasma parameters in a He- N2/Ar magnetic pole enhanced inductive plasma source
Author:
Affiliation:
1. Department of Physics, Quaid-i-Azam University, 45320 Islamabad, Pakistan
2. Department of Physics, Plasma Physics Laboratory, COMSATS Institute of Information Technology, 44000 Islamabad, Pakistan
Funder
Higher Education Commission, Pakistan (HEC)
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4942627
Reference17 articles.
1. On the heating mode transition in high-frequency inductively coupled argon discharge
2. Ion bombardment energy distributions in a radio frequency induction plasma
3. Experiments and global model of inductively coupled rf Ar/N2 discharges
4. Surface reactions during etching of organic low-k films by plasmas of N2 and H2
5. Nitrogen dissociation in a low pressure cylindrical ICP discharge studied by actinometry and mass spectrometry
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