Comparison of pull‐in voltages in MEMS using 3D FEM and analytical approaches-Reference-Cited by-同舟云学术

Comparison of pull‐in voltages in MEMS using 3D FEM and analytical approaches

Published:2010-11-16 Issue:6 Volume:29 Page:1653-1661
ISSN:0332-1649
Container-title:COMPEL - The international journal for computation and mathematics in electrical and electronic engineering
language:en
Short-container-title:COMPEL

Author:

Bölöni Francisc,Benabou Abdelkader,Tounzi Abdelmounaïm

Publisher

Emerald

Subject

Applied Mathematics,Electrical and Electronic Engineering,Computational Theory and Mathematics,Computer Science Applications

Reference8 articles.

1. Boloni, F., Krebs, G., Henneron, T. and Tounzi, A. (2008), “3D study of an electrostatic MEMS device taking account of the active part displacement”, Proceedings of the 13th Biennal IEEE Conference on Electromagnetic Field Computation (CEFC 2008 ), Athens, p. 71.

2. Finite Element Modeling of Electrostatic MEMS Including the Impact of Fringing Field Effects on Forces

3. Chowdhury, S., Ahmadi, M. and Miller, W.C. (2005), “A comparison of pull‐in voltage calculation methods for MEMS‐based electrostatic actuator design”, Proceedings of the 1st International Conference on Sensing Technology, Palmerston North, November, pp. 112‐17.

4. Finite element implementation of virtual work principle for magnetic or electric force and torque computation

5. Coupling of local and global quantities in various finite element formulations and its application to electrostatics, magnetostatics and magnetodynamics

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