Static characterization of microstructures using AOMSI and temporal phase-shifting (TPS) methods-Reference-Cited by-同舟云学术

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Static characterization of microstructures using AOMSI and temporal phase-shifting (TPS) methods

Published:2012-03-28 Issue:5 Volume:18 Page:661-666
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Jahani Davoud,Narayanswamy Sivakumar,Packirisamy Muthukumaran,Pai Murali Manohohar

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-012-1482-4.pdf

Reference11 articles.

1. Abdel-Rahman E, Younis M, Nayfeh A (2002) Characterization of the mechanical behavior of an electrically actuated microbeam. J Micromech Microeng 1317(51):759–766. doi: 10.1088/0960-1317/12/6/306

2. Bölöni F, Benabou A, Tounzi A (2010) Comparison of pull-in voltages in MEMS using 3D FEM and analytical approaches. doi: 10.1108/03321641011078715

3. Chowdhury S, Ahmadi M, Miller WC (2005) Pull-in voltage calculations for MEMS sensors with cantilevered beams. doi: 10.1109/NEWCAS.2005.1496695

4. Dakin J (2006) Handbook of optoelectronics. CRC Press, London

5. Manohar Pai M, Rinaldia G, Sivakumara N, Packirisamy M (2009) Low-frequency static characterization of microstructures using acousto-optic modulated stroboscopic interferometer. Opt Lasers Eng 47(2):230–236. doi: 10.1016/j.optlaseng.2008.02.009

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