Ring gyroscope sensitive element based on nanoporous alumina

Abstract

Purpose This paper aims to present new technological approaches of manufacturing of micromechanical gyroscope ring-sensitive element based on the nanoporous anodic alumina instead of traditional silicon technology. Simulation and the operation analyses of such elements have been performed. Design/methodology/approach The design of gyroscope represents a sensitive element on a glass substrate; in the center of a ring, there is a permanent magnet in a steel box. The sensitive element is made of profiled nanoporous anodic alumina consisting of an octagonal frame which is connected to a ring in the center with eight N-shaped spokes. The technology of the sensitive element fabrication involves the electrochemical formation of nanoporous anodic alumina substrate given the thickness and porosity and its chemical etching on the element topology. The basic parameters and the operation principle of the nanoporous alumina-sensitive element have been defined by finite element simulation. Findings It is shown that the resonance frequencies of the sensitive element change as functions of the alumina porosity. The main parameters of the nanoporous alumina-sensitive element have been compared with parameters of a silicon-sensitive element. Calculations have shown that the mechanical deformations of the von Mises are approximately lower by two times in the nanoporous alumina-sensitive element. Practical implications High-precision angular rate measurement will be achieved by reducing mechanical and electrical noises practically to zero through careful designing of a ring magnetoelectric gyroscope Originality/value The ring resonator made of nanoporous anodic alumina will allow to increase the threshold of sensitivity and stability of micromechanical gyroscope characteristics owing to the high precision of geometric dimensions, the stability of the elastic properties and the quality factor.