Preparing TEM Specimens and Atom Probe Tips by Laser Machining

Author:

Rottwinkel Boris,Kreutzer André,Spott Henry,Krause Michael,Schusser Georg,Höche Thomas

Abstract

Abstract

Publisher

Cambridge University Press (CUP)

Subject

General Medicine

Reference9 articles.

1. Th Höche , PCT Patent Application WO 2013/026707 A1.

2. Low-fluence femtosecond-laser interaction with a Mo/Si multilayer stack

3. T Sato and J Byrnes , “TEM sample preparation workflow using laser ablation and broad ion beam milling,” 19th International Microscopy Congress (IMC19), poster.

4. J Byrnes , “A combined laser ablation/focused ion beam approach to atom probe sample preparation,” 19th International Microscopy Congress (IMC19), poster.

5. Schmidt, “Nanoscale 3D X-ray Microscopy for High Density Multi-Chip Packaging FA” 44 th International Symposium for Testing and Failure Analysis (ISTFA2018) (2018) 424–28.

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